二氧化硅薄膜,Silica film
1)Silica film二氧化硅薄膜
1.Without doping,plasma enhanced chemical vapor deposition (PECVD) of silica films on Si substrates with gas mixtures of SiH_4 and N_2O is considered.以硅烷和氧化二氮作为反应气体 ,采用等离子体增强化学气相沉积 (PECVD)技术 ,不使用掺杂 ,在单晶硅衬底上制备了用于平面光波导的二氧化硅薄膜
英文短句/例句

1.Preparation of Thin SiO_2 Films from Polysilane Coatings Using Oxygen Plasma Method;氧等离子体处理聚硅烷涂层制备二氧化硅薄膜
2.Si rich SiO2 films have been prepared by a rf magnetron sputter method.用射频磁控溅射法制备了富硅二氧化硅薄膜
3.Main Chemical Reactions and Methods in Silicon Dioxide Film Deposition Technologies;二氧化硅薄膜沉积技术的主要化学反应与方法
4.Study on Preparation and Characteristic of Silicon Dioxide Film Doped by Organic Dyes;染料掺杂二氧化硅薄膜的制备与性能研究
5.Research and Preparation of Superhydrophobic Silica Thin Films by Emulsion Method乳液法制备超疏水二氧化硅薄膜的研究
6.The Study of the Deposition of SiO_2 Films with RF Cold Plasma at Atmospheric-pressure;常压射频低温等离子体增强化学气相沉积二氧化硅薄膜的研究
7.SOL AND THE COMPOSITION OF THE CATALYST ON THE SOL-GEL SILICA FILM PREPARED BY THE IMPACT OF CRACK溶胶组成及催化剂对溶胶-凝胶制备二氧化硅薄膜开裂的影响
8.Effect of age process on the microstructure of nanoporous silica film老化工艺对纳米多孔二氧化硅薄膜微观结构影响
9.Preparation of Super-hydrophobic Silica Films with Visible Transmission by Sol-gel Method;溶胶凝胶法制备透明超疏水纳米二氧化硅薄膜的研究
10.Biosensor based on acetylcholinesterase immobilized on mesoporous silica thin films介孔二氧化硅薄膜固定乙酰胆碱酯酶生物传感器
11.In-situ diagnosis during preparation of SiO_x thin films by mass spectroscopy and their characteristics制备二氧化硅薄膜的质谱原位诊断及其特性研究
12.Studies on super-hydrophilic of silicon-doped titanium dioxide composite film掺硅二氧化钛复合薄膜超亲水性研究
13.Electroluminescence from a Mn~(2+) Activated SiO_2:Si Film on n~+-Si Substrate硅基掺锰富硅氧化硅薄膜的电致发光
14.The fabrication of the high Sn-doped silica film and the measurement of its refractive index高掺锡二氧化硅玻璃薄膜的制作及折射率测量
15.Preparation, Structure and Optical Absorption Properties of Ag, CuO/SiO_2 Nanocomposite Films;银、氧化铜/二氧化硅纳米复合薄膜的制备、结构和光吸收性能研究
16.Study on Preparation and Morphology of the Polyimide/Silica Hybrid Films Derived from Base Catalyzed TEOS碱催化聚酰亚胺/二氧化硅杂化薄膜的制备与微相结构研究
17.Preparation of Polyimide/Silica/Silver Hybrid Films and Study on the Structure and Properties;聚酰亚胺/二氧化硅/银杂化薄膜的制备及结构性能研究
18.Influence of Solvent on Microscopic Morphologies of PI/SiO_2 Nano-hybrid Films溶剂对聚酰亚胺/二氧化硅纳米杂化薄膜微观形貌影响
相关短句/例句

silica coating二氧化硅薄膜
3)silicon dioxide films二氧化硅薄膜
1.FT-IR study of silicon dioxide films fabricated by rapid thermal oxidation;快速热氧化制备二氧化硅薄膜的红外研究
4)SiO2 films二氧化硅薄膜
1.The high tin-doped SiO2 films prepared by CVD will bring some crystals,but sol gel can control the accurate chemical component of the films.由于普通的化学气相沉积法制作高掺Sn的二氧化硅薄膜比较容易产生结晶,而溶胶-凝胶法制备薄膜化学组成比较容易控制,可以制作出掺Sn浓度较大的材料。
5)ultrathin SiO 2 films二氧化硅超薄膜
1.Surface morphology and local electronic properties of ultrathin SiO 2 films grown by in situ thermal oxidation on Si(111) substrates in ultrahigh vacuum have been investigated by using scanning tunneling microscopy (STM) and scanning tunneling spectroscopy (STS) at room temperature.用超高真空热氧化方法在Si(1 1 1 )清洁衬底上生长了二氧化硅超薄膜 ,并利用超高真空扫描隧道显微镜和扫描隧道谱技术对超薄膜的表面形貌和局域电学特性进行了研究。
6)SIO_2-LIKE FILM类二氧化硅薄膜
延伸阅读

二氧化硅薄膜介质材料分子式:SiO2CAS号:性质:一种高纯氧化膜。具有介电性能稳定、耐潮性好、电容温度系数小和介质损耗角正切值小等优点。介电常数3.67~5.90,tgδ<2×10-4,击穿电压大于50V。采用电子束蒸发法、射频溅射法、热氧化法等制取,主要用于制作半导体混合集成电路和薄膜集成电路的MOS电容器和隔离绝缘层等。